齐发体育

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齐发体育chaodiandianliugaoxingnengjinhongwaiguijiguangdiantanceqiyanjiu

  

  yiguangweixinxizaitishixiantongxindeguangtongxinjishu,pingjieyouyidesuduchuanshuxingnengheqiangdadexinxirongliangchengweixiandaishehuizuizhongyaodejishuzhiyi。qizhongguiguangzixue,yuchengshudehubujinshuyanghuawubandaoti(cmos)zhizaogongyijianrong,bingqiebansuizhegeleiyouyuan、wuyuandeguijiguangziqijiandeshixianzhujianchengweiduanchengguangtongxinzhongzuijuqianjingdejishu。zhixingguangdianxinhaozhuanhuandeguangdiantanceqishiguangdianlianludejibenzuchengbufenzhiyi,suiranguijiguangdiantanceqiguangfanyingyongyukejianguangpufanwei(0.4-0.7μm),dantongxunchuangkou1.31he1.55μmdejinhongwaiguangzinengliangbingbuzuyikefusidaixi(1.12 ev)youdaoguangshengdianliu,yinciruheshixianguijitanceqi1.1μmyishangdejinhongwaitancerengranshifazhandanpianguangdianjichengjishusuomianlindenanti。jinnianlai,guijixiaotejierjiguanjiyudutedeneiguangdianfashejizhierbeishouguanzhu,tanengzaishiwenxiatancedaonengliangdiyuguidaixideguang,qiecailiaojiegouhezhizaogongyijiandanlianjia,youkenengmanzuchunguijinhongwaiguangdiantanceqidexuyao。ranerchuantongdejinshu-guijiegoutanceqicunzaixiangyingdidequexian,yongtoumingdaodianboli(ito)daitichuantongjinshukeyiyouxiaogaishanqijianxiangyingdu,danyemianlinandianliuguodadewenti,yanzhongyingxiangtanceqidelingmindu。ruhebaozhengtanceqiduisuoxubozhangyouxiangyingbingqieyouzugoudexiangying,tongshijinyibujiangdiqijianandianliutishengqilingmindu,shishixiangaoxingnengjinhongwaiguijitanceqideguanjian。

  近日,齐发体育物理研究所/北京凝聚态物理国家研究中心清洁能源实验室E03组博士生李欣欣在陈弘研究员、邓震副研究员的指导下,通过在硅衬底上制备纳米级的Au薄膜和ITO电极(图1),在硅基肖特基光电探测器研究方面取得了重要进展。实验结果表明,高功函数Au的加入有效地提高了肖特基势垒高度从而极大地抑制了器件暗电流,-1V下的暗电流密度为3.7×10-7A/cm2,比无Au插入的ITO/n-Si器件暗电流密度降低了7000多倍,±1V下的整流比高达1.5×108齐发体育,这是硅基肖特基红外探测器目前所报道的最好结果(图2)。同时基于Au是延展性最好的金属,进一步减小中间插入层Au的厚度,结果显示2nm Au插入层能在保障器件暗电流性能的前提下明显地提升响应度,从而得到更高的光/暗电流比,大幅改善硅基肖特基光电探测器的整体性能(图3)。该工作作为一种具有低暗电流密度的硅基红外光电探测器将为实现光通信中单片集成纯硅光电探测器提供重要借鉴,期待未来在可见光至1.55μm甚至更长波段的光谱探测方面有重要应用。

  gaiyanjiujieguojinriyi“hybrid nano-scale au with ito structure for high-performance near-infrared silicon-based photodetector with ultralow dark current”weitifabiaozaiphotonics researchshang。

  xiangguangongzuodedaoleguojiazirankexuejijin(61991441, 11574362, 61804176)dezhichi。

  

 

齐发体育  tu1. ito/au/n-si xiaotejiguangdiantanceqigongyiliuchengshiyitu。

 

  图2. (a)线性坐标、(b)半对数坐标下0nm和6nm Au肖特基光电探测器暗态室温J?V特性。(c) 6nm Au探测器J?V温度依赖特性。(d) Ln(J/T2齐发体育)和1000/T关系图。 (e)1310 nm、(f)1064 nm激光下室温光、暗态J?V特性。

 

  图3. (a) 2-6nm Au肖特基光电探测器暗态室温J?V特性。(b) 0-6nm Au肖特基光电探测器Ln(J/T2)和1000/T关系图。(c) 零偏压下1100-1700nm器件光响应。 (d) 1310nm激光下器件光电流随偏压变化。(f) 1310nm激光下器件?1V下的暗电流、光电流以及光/暗电流之比。

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